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The CO2 Bubbler can constantly control the Resistivity of ultrapure water within the safe range Of 0.1 ~1MÙ. cm. It can even modulate the resistivity Beforehand in event of sudden changes in flowrate.
CL6801/1201 Semiconductor dicing cleaning System is controlled by logical microprocessor which applies high pressure water or gas via Atomizing nozzle,Thereby removing residue on both the surface and dicing channels.